| dc.identifier.uri | http://hdl.handle.net/11401/72213 | |
| dc.identifier.uri | http://hdl.handle.net/1951/48167 | |
| dc.description.sponsorship | This work is sponsored by the Stony Brook University Graduate School in compliance with the requirements for completion of degree. | en_US |
| dc.format | Monograph | |
| dc.format.medium | Electronic Resource | en_US |
| dc.language.iso | en_US | |
| dc.publisher | The Graduate School, Stony Brook University: Stony Brook, NY. | |
| dc.type | Thesis | |
| dcterms.available | 2010-08-18T13:51:19Z | |
| dcterms.available | 2015-04-24T14:51:05Z | |
| dcterms.creator | Choi, Joo Hoon | |
| dcterms.dateAccepted | 2010-08-18T13:51:19Z | |
| dcterms.dateAccepted | 2015-04-24T14:51:05Z | |
| dcterms.dateSubmitted | 2010-08-18T13:51:19Z | |
| dcterms.dateSubmitted | 2015-04-24T14:51:05Z | |
| dcterms.format | Monograph | |
| dcterms.format | Application/PDF | en_US |
| dcterms.identifier | http://hdl.handle.net/11401/72213 | |
| dcterms.identifier | http://hdl.handle.net/1951/48167 | |
| dcterms.issued | 2009-05-01 | |
| dcterms.language | en_US | |
| dcterms.provenance | Submitted by Karen D'Angelo (kdangelo@notes.cc.sunysb.edu) on 2010-08-18T13:51:19Z
No. of bitstreams: 1
000000561.sbu.pdf: 2817319 bytes, checksum: f85ed521d0f9215bd74d533ef5d6bf0f (MD5) | en_US |
| dcterms.provenance | Made available in DSpace on 2010-08-18T13:51:19Z (GMT). No. of bitstreams: 1
000000561.sbu.pdf: 2817319 bytes, checksum: f85ed521d0f9215bd74d533ef5d6bf0f (MD5)
Previous issue date: 2009-05-01 | en_US |
| dcterms.provenance | Made available in DSpace on 2011-01-12T15:01:16Z (GMT). No. of bitstreams: 3
000000561.sbu.pdf.txt: 171382 bytes, checksum: 83e2ebe60bd31a068045d649c6bf2010 (MD5)
license.txt: 1763 bytes, checksum: 089dbf15e7b5ae3a98a8cf288edb0922 (MD5)
000000561.sbu.pdf: 2817319 bytes, checksum: f85ed521d0f9215bd74d533ef5d6bf0f (MD5)
Previous issue date: 2009-05-01 | en |
| dcterms.provenance | Made available in DSpace on 2015-04-24T14:51:05Z (GMT). No. of bitstreams: 4
000000561.sbu.pdf.jpg: 1894 bytes, checksum: a6009c46e6ec8251b348085684cba80d (MD5)
000000561.sbu.pdf.txt: 171382 bytes, checksum: 83e2ebe60bd31a068045d649c6bf2010 (MD5)
license.txt: 1763 bytes, checksum: 089dbf15e7b5ae3a98a8cf288edb0922 (MD5)
000000561.sbu.pdf: 2817319 bytes, checksum: f85ed521d0f9215bd74d533ef5d6bf0f (MD5)
Previous issue date: 2009-05-01 | en |
| dcterms.publisher | The Graduate School, Stony Brook University: Stony Brook, NY. | |
| dcterms.subject | lateral force microscopy | |
| dcterms.subject | LFM | |
| dcterms.subject | CMP polishing particle | |
| dcterms.subject | friction | |
| dcterms.title | Measurements of Friction and Wear in Chemical Mechanical Polishing Using Single Particle Analog Probes | |
| dcterms.type | Thesis | |
